Concepedia

Publication | Closed Access

Structural and electronic characterization of β-SiC films on Si grown from mono-methylsilane precursors

DOI

45

Citations

3

References

1995

Year

G. Krötz, W. Legner, Gerhard Müller, H.W. Grueninger, L. Snith, B. Leese, A.C. Jones, S. Rushworth
Materials Science and Engineering B

References

YearCitations

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