Surface and Coatings Technology · 1998 · 32 citations · 2 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsCoating ProcessesCoating TechnologyCoatingsMagnetic Thin FilmsSurface CoatingsThin-film DepositionMagnetron SputteringSputter DepositionSputteringSputtering ProcessesSputtering TechniquesThin-film Coatings
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Pulsed magnetron sputter technology
S. Schiller, K. Goedicke, J. Reschke et al. · Surface and Coatings Technology · 1993 · 338 citations