Helium ion microscope invasiveness study and novel imaging analysis for semiconductor applications

Quest for high brightness, monochromatic noble gas ion sources

Vipin N. Tondare · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 109 citations

Engineering, Materials Engineering, Materials Science +11

Application of advanced micromachining techniques for the characterization and debug of high performance microprocessors

Richard H. Livengood, Paul Winer, Valluri Rao · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 25 citations

Engineering, Computer Engineering, Electrical Engineering +17

High-brightness source for ion and electron beams (invited)

S. Kalbitzer, A. Knoblauch · Review of Scientific Instruments · 1998 · 15 citations

Natural Sciences, Materials Science, Physics +13

Localized field ion emission using adsorbed hydrogen films on 〈110〉-oriented tungsten field emitters

P. R. Schwoebel, G. Hanson · Journal of Applied Physics · 1984 · 13 citations · Full text

Natural Sciences, Materials Science, Physics +15