Diffusion of arsenic along dislocations in epitaxial silicon films

The analysis of grain boundary diffusion measurements

A.D. Le Claire · British Journal of Applied Physics · 1963 · 622 citations

Engineering, Materials Engineering, Sediment Transport +12

Radiation Damage and Defects in Semiconductors

G Carter · Physics Bulletin · 1973 · 380 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Effect of complex formation on diffusion of arsenic in silicon

Richard B. Fair, Gary R. Weber · Journal of Applied Physics · 1973 · 157 citations

Natural Sciences, Chemistry, Materials Science +17

Structure and Origin of Stacking Faults in Epitaxial Silicon

R. H. Finch, H. J. Queisser, G. Thomas et al. · Journal of Applied Physics · 1963 · 125 citations

Natural Sciences, Materials Engineering, Materials Science +17

Excess vacancy generation mechanism at phosphorus diffusion into silicon

Masayuki Yoshida, Eisuke Arai, Hiroaki Nakamura et al. · Journal of Applied Physics · 1974 · 117 citations

Engineering, Materials Engineering, Materials Science +17