Journal of Electronic Materials · 1992 · 15 citations · 3 references
EngineeringMaterials EngineeringMaterials ScienceSemiconductor DevicesSurface EngineeringSurface ScienceEtching ProcessesSemiconductor Device MaterialsSilicon MaterialsSurface ModificationSurface PreparationThin Film EtchingEtchingPassivation Of Silicon SurfacesSilicon EtchingSilicon PassivationSurface Etching
3
Gas-phase selective etching of native oxide
Nobuhiko Miki, H. Kikuyama, I. Kawanabe et al. · IEEE Transactions on Electron Devices · 1990 · 80 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +14