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Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors

DOI

29

Citations

29

References

2011

Year

H. Mafhoz Kotb, L. Bouscayrol, E. Scheid, M. Andrieux, C. Legros, Sylvie Schamm‐Chardon
Thin Solid Films

References

YearCitations

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