Concepedia

Studies of the Ti-W/Au metallization on aluminum

Ronald S. Nowicki, Joel M. Harris, M‐A. Nicolet, I.V. Mitchell

Thin Solid Films · 1978 · 80 citations · 13 references

DOI

Concepts

References

13

Diffusion barriers in thin films

M.−A. Nicolet · Thin Solid Films · 1978 · 684 citations

, , +10

Principles and applications of ion beam techniques for the analysis of solids and thin films

J. W. Mayer, M‐A. Nicolet, T.M. Buck et al. · Thin Solid Films · 1973 · 332 citations

, , +12

Thin Films Deposited by Bias Sputtering

L. I. Maissel, Philipp Schaible · Journal of Applied Physics · 1965 · 170 citations

, , +17

Metallization in microelectronics

P. B. Ghate, J.C. Blair, C.R. Fuller · Thin Solid Films · 1977 · 68 citations

Corrosion Resistance of Several Integrated-Circuit Metallization Systems

James A. Cunningham, C.R. Fuller, C. T. Haywood · IEEE Transactions on Reliability · 1970 · 55 citations

, , +17