An evaluation of electrolytic repair of discontinuous PVD copper seed layers in damascene vias - Concepedia

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An evaluation of electrolytic repair of discontinuous PVD copper seed layers in damascene vias

19

Citations

4

References

2004

Year

J. Sukamto, Eric G. Webb, Tatyana A. Andryushchenko, Jon B. Reid

Journal of Applied Electrochemistry

Materials ScienceChemical EngineeringEngineeringDamascene ViasElectrolytic RepairElectrochemistry

References

	Year	Citations

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