Determination of the mechanical properties of thin polyimide films deposited on a GaAs substrate by bulging and nanoindentation tests

An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments

W. C. Oliver, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26.6K citations

Natural Sciences, Materials Engineering, Materials Science +16

Analysis of elastic and plastic deformation associated with indentation testing of thin films on substrates

A. Bhattacharya, William D. Nix · International Journal of Solids and Structures · 1988 · 538 citations

Natural Sciences, Materials Engineering, Materials Science +16

Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films

Martha Small, William D. Nix · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 292 citations

Natural Sciences, Materials Science, Physics +9

Microfabricated structures for the <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> measurement of residual stress, Young’s modulus, and ultimate strain of thin films

Mark G. Allen, Mehran Mehregany, Roger T. Howe et al. · Applied Physics Letters · 1987 · 253 citations

Natural Sciences, Materials Engineering, Materials Science +17

Two interferometric methods for the mechanical characterization of thin films by bulging tests. Application to single crystal of silicon

Éric Bonnotte, P. Delobelle, L. Bornier et al. · Journal of materials research/Pratt's guide to venture capital sources · 1997 · 62 citations

Natural Sciences, Materials Engineering, Materials Science +15