Two interferometric methods for the mechanical characterization of thin films by bulging tests. Application to single crystal of silicon

The tension of metallic films deposited by electrolysis

G. Stoney · Proceedings of the Royal Society of London Series A Containing Papers of a Mathematical and Physical Character · 1909 · 4.8K citations · Full text

Natural Sciences, Chemistry, Materials Science +11

Calculated elastic constants for stress problems associated with semiconductor devices

William A. Brantley · Journal of Applied Physics · 1973 · 1.2K citations

Natural Sciences, Materials Engineering, Materials Science +17

Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm

P. Hariharan, B. F. Oreb, Tomoaki Eiju · Applied Optics · 1987 · 918 citations

Natural Sciences, Vision Science, Optics +10

A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films

Joost J. Vlassak, William D. Nix · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 698 citations

Natural Sciences, Materials Engineering, Materials Science +10

Stresses and deformation processes in thin films on substrates

M. Doerner, William D. Nix · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1988 · 604 citations

Natural Sciences, Materials Engineering, Materials Science +17