Frequency Tuning of Work Modes in<i>Z</i>-Axis Dual-Mass Silicon Microgyroscope

Abstract

Frequency tuning of work modes in the silicon vibratory gyroscope is studied by the theoretical, numerical, and experimental methods in this paper. First, the schematic structure and simplified kinematics model of the gyroscope were presented for deducing the natural frequencies. Then, the width and length of support beams were optimized to tune work frequencies at their designed value. Besides, the frequency difference was experimentally tested and manually tuned by varying the voltage applied on the tuning capacitors. The test on a prototype showed that the difference could be localized between −55.8 Hz and 160.2 Hz when the tuning voltage limit is 20 V. Finally, a frequency control loop was developed to automatically tune the sense frequency toward the drive frequency. Both the theoretical analysis and numeric simulation show that the difference is stabilized at 0.8 Hz when no Coriolis force or quadrature coupling force is applied. It is proved that the frequency difference is successfully tuned by modifying the size of support beams before fabrication as well as the voltage applied on the tuning capacitors after fabrication. The automatic tuning loop, used to match the work modes, is beneficial to enhance the performance of the gyroscope as well as its resistance to environment disturbances.