Concepedia

Optical properties and chemical bonding characteristics of amorphous SiNX:H thin films grown by the plasma enhanced chemical vapor deposition method

Yin He, Yuanzhe Wang, Wang Li, Weizhi Han, Zhijuan Hu, Xiaomei Qin, Guoping Du, Wangzhou Shi

Journal of Non-Crystalline Solids · 2011 · 12 citations · 18 references

References

18

The hydrogen content of plasma-deposited silicon nitride

W. A. Lanford, Myron J. Rand · Journal of Applied Physics · 1978 · 782 citations

Natural Sciences, Chemistry, Materials Science +17

Local atomic structure in thin films of silicon nitride and silicon diimide produced by remote plasma-enhanced chemical-vapor deposition

D. V. Tsu, G. Lucovsky, M. J. Mantini · Physical review. B, Condensed matter · 1986 · 307 citations

Natural Sciences, Chemistry, Materials Science +17

Comparative investigation of hydrogen bonding in silicon based PECVD grown dielectrics for optical waveguides

Feridun Ay · Optical Materials · 2004 · 266 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Defect passivation of industrial multicrystalline solar cells based on PECVD silicon nitride

Filip Duerinckx, Jozef Szlufcik · Solar Energy Materials and Solar Cells · 2002 · 248 citations

Engineering, Materials Engineering, Materials Science +15

Progress in Low-temperature Surface Passivation of Silicon Solar Cells using Remote-plasma Silicon Nitride

Armin G. Aberle, Rudolf Hezel · Progress in Photovoltaics Research and Applications · 1997 · 159 citations

Engineering, Materials Engineering, Materials Science +17