Publication | Open Access

Comparative investigation of hydrogen bonding in silicon based PECVD grown dielectrics for optical waveguides

PhotonicsElectrical EngineeringOptical MaterialsEngineeringOptical PropertiesApplied PhysicsComparative InvestigationGuided-wave OpticPhotonic Integrated CircuitHydrogen BondingPecvd Grown DielectricsOptoelectronicsPlanar Waveguide SensorElectro-optics Device