Mechanical stress at the (111) Si surface covered by SiO2 and AlSiO2 layers

The tension of metallic films deposited by electrolysis

G. Stoney · Proceedings of the Royal Society of London Series A Containing Papers of a Mathematical and Physical Character · 1909 · 4.8K citations · Full text

Measurement of Strains at Si-SiO2 Interface

R. J. Jaccodine, William A. Schlegel · Journal of Applied Physics · 1966 · 401 citations

Materials Science, High Temperature Materials, Engineering +12

Thermal Expansion of Some Crystals with the Diamond Structure

D. F. Gibbons · Physical Review · 1958 · 294 citations

Engineering, Thermal Expansion, Crystal Growth Technology +17

A metal-insulator-piezoelectric semiconductor electromechanical transducer

R.S. Muller, Y. Conragan · IEEE Transactions on Electron Devices · 1965 · 37 citations

Electrical Engineering, Engineering, Transducer Action +11

Stress concentration in silicon-insulator interfaces

Julio H. Serebrinsky · Solid-State Electronics · 1970 · 27 citations

Engineering, Stress-induced Leakage Current, Silicon Debugging +5