Intrinsic thermal behaviour of capacitive pressure sensors: mechanisms and minimisation

Field Assisted Glass-Metal Sealing

George Wallis, D. Pomerantz · Journal of Applied Physics · 1969 · 730 citations

Natural Sciences, Materials Engineering, Materials Science +7

Capacitive sensors: When and how to use them

Robert Puers · Sensors and Actuators A Physical · 1993 · 327 citations · Full text

Engineering, Materials Engineering, Materials Science +12

A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity

Y. S. Lee, K.D. Wise · IEEE Transactions on Electron Devices · 1982 · 217 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Selection of glass, anodic bonding conditions and material compatibility for silicon-glass capacitive sensors

Tony Rogers, Jan Kowal · Sensors and Actuators A Physical · 1995 · 187 citations

Engineering, Materials Engineering, Materials Science +16

Characterization of the electrostatic bonding of silicon and Pyrex glass

Adriana Cozma · Journal of Micromechanics and Microengineering · 1995 · 157 citations

Engineering, Materials Engineering, Materials Science +16