Journal of Electron Spectroscopy and Related Phenomena · 1992 · 57 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsSurface ScienceSemiconductor InterfacesSemiconductor PhysicsSemiconductor SurfacesSurface CleaningSurface SpectroscopyX-ray Photoelectron SpectroscopySemiconductor Surface PreparationSputter DepositionSputteringSputtering ProcessesSputtering TechniquesSurface Cleaning EffectsSurface Sputtering
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