Sensors and Actuators A Physical · 2004 · 107 citations · 12 references
EngineeringMechanical EngineeringFluid DynamicsMicroelectromechanical SystemsMicrofabricationFlow MeasurementFlow MetrologyFlow SensorsMechanical SensorsMicroelectromechanical SensorsMicromachiningFlow DirectionFlow Velocity MeasurementsMems Flow SensorsMicrofluidic Flow Measurement
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Anemometer with hot platinum thin film
F. Mailly, R. Bonnot, Pierre Temple‐Boyer et al. · Sensors and Actuators A Physical · 2001 · 204 citations
An air flow sensor modeled on wind receptor hairs of insects
Yoshihiko Ozaki, Takahiro Ohyama, Takashi Yasuda et al. · 2002 · 124 citations
Michael Curt Elwenspoek · 2003 · 91 citations
Thermal flow sensor for liquids and gases
M. Ashauer, H. Glosch, F. Hedrich et al. · 2002 · 48 citations
Engineering, Chemical Engineering, Mechanical Engineering +12