Analysis of amorphous layers on silicon by backscattering and channeling effect measurements

Defect studies in crystals by means of channeling

E. Bøgh · Canadian Journal of Physics · 1968 · 362 citations

Engineering, Defect Tolerance, Light Ions +16

Structural Evaluation of Silicon Oxide Films

W. A. Pliskin, H. Lehman · Journal of The Electrochemical Society · 1965 · 349 citations · Full text

Materials Engineering, Materials Science, Chemical Engineering +13

Microanalysis of the stable isotopes of oxygen by means of nuclear reactions

G. Amsel, David Samuel · Analytical Chemistry · 1967 · 277 citations

Isotope Analysis, Stable Isotopes, Engineering +14

Implantation and Annealing Behavior of Group III and V Dopants in Silicon as Studied by the Channeling Technique

L. Eriksson, John Davies, Nils Gunnar Johansson et al. · Journal of Applied Physics · 1969 · 170 citations

Engineering, Silicon On Insulator, Hot Implants +19

Range of Heavy Ions in Solids

D. Powers, Ward Whaling · Physical Review · 1962 · 96 citations · Full text

Materials Engineering, Materials Science, Heavy Ion Physic +11