Die separation and packaging of a surface micromachined piezoresistive pressure sensor

Piezoresistance in polysilicon and its applications to strain gauges

P.J. French, A G R Evans · Solid-State Electronics · 1989 · 185 citations

Engineering, Materials Engineering, Materials Science +7

Gases, liquids and solids: and other states of matter

Choice Reviews Online · 1992 · 101 citations

Natural Sciences, Materials Science, Physics +17

Low power integrated pressure sensor system for medical applications

C. Hierold, B. Clasbrummel, D. Behrend et al. · Sensors and Actuators A Physical · 1999 · 76 citations

Engineering, Bioengineering, Biomedical Engineering +16

Advanced hybrid integrated low-power telemetric pressure monitoring system for biomedical applications

T. Eggers, Claudia Marschner, Uwe Marschner et al. · 2002 · 71 citations

Engineering, Bioengineering, Biomedical Engineering +17

Single chip bumping and reliability for flip chip processes

Matthias Klein, Hermann Oppermann, R. Kalicki et al. · Microelectronics Reliability · 1999 · 29 citations

Engineering, Computer Engineering, Electrical Engineering +14