Control of surface charging during high current ion implantation

Electrical breakdown in thin gate and tunneling oxides

Ih-Chin Chen, S. Holland, Chenming Hu · IEEE Transactions on Electron Devices · 1985 · 484 citations

Engineering, Electrical Engineering, Physics +17

Charging of insulators by ion bombardment and its minimization for secondary ion mass spectrometry (SIMS) measurements

H. W. Werner, A. E. Morgan · Journal of Applied Physics · 1976 · 128 citations

Natural Sciences, Materials Engineering, Materials Science +13

Kinetics of charge trapping in dielectrics

D. R. Wolters, J. J. van der Schoot · Journal of Applied Physics · 1985 · 110 citations

Natural Sciences, Materials Engineering, Materials Science +17

The dielectric reliability of intrinsic thin SiO₂films thermally grown on a heavily doped Si substrate—characterization and modeling

Chiou-Feng Chen, Ching-Yuan Wu, Ming‐Kwang Lee et al. · IEEE Transactions on Electron Devices · 1987 · 67 citations

Engineering, Electrical Engineering, Materials Science +17

Wafer charging and beam interactions in ion implantation

M. Mack, G. Ryding, D. H. Douglas−Hamilton et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 27 citations

Natural Sciences, Materials Science, Physics +13