Charging of insulators by ion bombardment and its minimization for secondary ion mass spectrometry (SIMS) measurements

Abstract

The generation of charge build-up, caused by bombardment of insulating samples with energetic particles, and its role in altering the relative secondary-ion currents and reducing their absolute values, sometimes even to zero, are discussed. Proposed methods for charge reduction by bombardment with negative ions or with neutral particles, or by use of an auxiliary electron beam or spray gun, are shown to be not useful in every experimental situation. A further method involving introduction of an auxiliary conducting electrode when using negative primary ions is considered mechanistically, and tested by placing tantalum diaphragms onto the surface of yttrium iron garnet (YIG). The final charging values and mass spectra thus obtained are compared to those measured when using bare and metallic grid-covered surfaces of the same YIG sample. The satisfactory results achieved with the diaphragm show that SIMS analyses of insulators can be performed in a simple, quick, and inexpensive manner.