Applied Surface Science · 2014 · 11 citations · 19 references
Natural SciencesMaterials EngineeringMaterials ScienceHeat TransferThermal AnalysisThin FilmsMetalsThermal Properties Of MaterialsThin Film Thermal PropertiesTemperature-dependent Thermal PropertiesThermal StabilityThin Film Thermal Transport
19
Copper interconnections and reliability
C.‐K. Hu, J. M. E. Harper · Materials Chemistry and Physics · 1998 · 280 citations
On the use of alloying elements for Cu interconnect applications
Katayun Barmak, C. Cabral, K. P. Rodbell et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 119 citations
Natural Sciences, Materials Engineering, Materials Science +17