A flexible polyimide-based package for silicon sensors

Chemical Etching of Silicon

Harry Robbins, Bertram Schwartz · Journal of The Electrochemical Society · 1959 · 253 citations

Natural Sciences, Chemistry, Materials Science +17

The Packaging of Implantable Integrated Sensors

Lyn Bowman, J.D. Meindl · IEEE Transactions on Biomedical Engineering · 1986 · 105 citations

Engineering, Biomedical Engineering, Materials Engineering +17

Tactile sensing: Technology and applications

Paolo Dario · Sensors and Actuators A Physical · 1991 · 83 citations

Engineering, Materials Engineering, Materials Science +10

Aluminum deposition on polyimides: The effect of <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> ion bombardment

M. J. Vasile, Bonnie Bachman · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +15

Flexible circuit and sensor arrays fabricated by monolithic silicon technology

P.W. Barth, S.L. Bernard, James B. Angell · IEEE Transactions on Electron Devices · 1985 · 45 citations

Engineering, Biomedical Engineering, Electrical Engineering +17