Low threshold vertical-cavity surface-emitting lasers based on high contrast distributed Bragg reflectors

Abstract

Data are presented on vertical-cavity surface-emitting lasers that use high contrast distributed Bragg reflectors on both sides of the cavity. The upper reflector consists of a six pair ZnSe/MgF quarter-wave stack, while the lower reflector consists of an eleven pair AlxOy/GaAs stack fabricated using selective oxidation. Strain due to the lower reflector is reduced by using AlxOy layers of less than a quarter-wave thickness. Device sizes ranging from 1 to 7 μm diameters are characterized, with a minimum threshold current of 53 μA.