Ultralow threshold current vertical-cavity surface-emittinglasersobtained with selective oxidation

Abstract

The authors report InGaAs single quantum well vertical-cavity surface-emitting lasers with an intracavity p-contact fabricated by selective oxidation of AlAs and distributed Bragg reflectors composed of binary materials (AlAs/GaAs). Record low threshold currents of 8.7 µA in ~3 µm square devices and 140 µA in 10 µm square devices with maximum output powers over 1.2 mW are achieved.