Electrostatic inchworm microsystem with long range translation

Single mask, large force, and large displacement electrostatic linear inchworm motors

Richard Yeh, S. Hollar, Kristofer S. J. Pister · Journal of Microelectromechanical Systems · 2002 · 142 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range

Jack W. Judy, D.L. Polla, W.P. Robbins · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 1990 · 77 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Modeling, design and testing of the electrostatic shuffle motor

Niels R. Tas, Jeroen Wissink, Louis Sander et al. · Sensors and Actuators A Physical · 1998 · 58 citations · Full text

Engineering, Electrical Engineering, Mechanical Engineering +12

Fourier-transform optical microsystems

Scott D. Collins, R. L. Smith, C. González et al. · Optics Letters · 1999 · 52 citations

Natural Sciences, Electrical Engineering, Microfabrication +16

Compact and precise positioner based on the Inchworm principle

Pierre Cusin, Takuhiko Sawai, Satoshi Konishi · Journal of Micromechanics and Microengineering · 2000 · 35 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +16