Concepedia

Publication | Closed Access

3D microstructures fabricated by partially opaque X-ray lithography masks

DOI

11

Citations

4

References

2000

Year

Stefano Cabrini, M. Gentili, Enzo Di Fabrizio, Annamaria Gerardino, Alessandro Nottola, Q. Leonard, L. Mastrogiacomo
Microelectronic Engineering

References

YearCitations

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