Advanced optical lithography development, from UV to EUV

Excimer Laser-Based Lithography: A Deep Ultraviolet Wafer Stepper

Victor Pol, James H. Bennewitz, Gary C. Escher et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1986 · 69 citations

Engineering, Manufacturing Engineering, Microfabrication +12

Step And Scan: A Systems Overview Of A New Lithography Tool

Jere D. Buckley, Charles Karatzas · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1989 · 22 citations

Natural Sciences, Physics, Microfabrication +12

Methods to print optical images at low-k 1 factors

Burn J. Lin · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 22 citations

Engineering, Manufacturing Engineering, Microfabrication +14