Concepedia
1
Publications
67
Citations
H-Index
1986
Active since
Affiliations
Nokia (United States)(Current)
James H. Bennewitz is an author at Nokia (United States).
Publications per year
1986–1986
Excimer Laser-Based Lithography: A Deep Ultraviolet Wafer Stepper
Victor Pol, James H. Bennewitz, Gary C. Escher et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1986 · 67 citations
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