Si etching affected by ir laser irradiation - Concepedia

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Si etching affected by ir laser irradiation

16

Citations

5

References

1985

Year

F. V. Bunkin, Boris Luk’yanchuk, A. I. Portniagin, A. A. Yeryomenko, P. Mogyorósi, J. Kiss

Applied Physics A

Materials ScienceEngineeringApplied PhysicsLaser-assisted DepositionIr Laser IrradiationPlasma EtchingOptoelectronicsSilicon On InsulatorLaser Damage

References

	Year	Citations

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