Infrared laser induced reaction of SF6 with silicon surfaces

Abstract

Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation T. J. Chuang; Infrared laser induced reaction of SF6 with silicon surfaces. J. Chem. Phys. 1 June 1980; 72 (11): 6303–6304. https://doi.org/10.1063/1.439045 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAIP Publishing PortfolioThe Journal of Chemical Physics Search Advanced Search |Citation Search