P. Mogyorósi

Pulsed laser ablative deposition of thin metal films

P. Mogyorósi, T. Szörényi, K. Bali et al. · Applied Surface Science · 1989 · 62 citations

Materials Science, Engineering, Ablative Deposition +6

Si etching affected by ir laser irradiation

F. V. Bunkin, Boris Luk’yanchuk, A. I. Portniagin et al. · Applied Physics A · 1985 · 16 citations

Materials Science, Engineering, Applied Physics +6

Ar+ laser-induced chemical etching of molybdenum in chlorine atmosphere

P. Mogyorósi, K. Piglmayer, D. Bäuerle · Surface Science · 1989 · 15 citations

Chemical Engineering, Engineering, Laser Photochemistry +6

Reaction pathways for ArF excimer laser assisted tungsten chemical vapor deposition from a WF6–H2 gas mixture

P. Heszler, J.‐O. Carlsson, P. Mogyorósi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 14 citations

Optical Materials, Engineering, Laser Applications +20

Spectroscopic investigations of gas-phase chemistry during laser-induced photolytic CVD of W

P. Mogyorósi, J.‐O. Carlsson, Mona Moradi · Applied Surface Science · 1992 · 12 citations

Laser-induced Photolytic Cvd, Gas-phase Chemistry, Photochemistry +8