Applied Physics Letters · 1982 · 99 citations · 9 references
EngineeringMaterials EngineeringMaterials ScienceOptoelectronicsPhotonicsSemiconductor MaterialsCompound SemiconductorsEtching ProcessesIntegrated Circuit FabricationLaser Material ProcessingLaser Surface ProcessingSemiconductor Device MaterialsAnisotropic EtchingDeep EtchingDevice FabricationDiffraction GratingsEtch MechanismsEtchingThrough-wafer EtchingWet Etching
A laser-based technique for rapid, anisotropic etching of compound semiconductors is described. Both holes for through-wafer vias and high-resolution diffraction gratings have been made with the process.
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