The oxidation of titanium silicide

Metastable phase formation in titanium-silicon thin films

R. Beyers, Robert Sinclair · Journal of Applied Physics · 1985 · 401 citations

Engineering, Materials Engineering, Materials Science +17

Nucleation of a new phase from the interaction of two adjacent phases: Some silicides

F. M. d’Heurle · Journal of materials research/Pratt's guide to venture capital sources · 1988 · 398 citations

Natural Sciences, Materials Science, Physics +13

Amorphous Ti-Si alloy formed by interdiffusion of amorphous Si and crystalline Ti multilayers

Karen Holloway, Robert Sinclair · Journal of Applied Physics · 1987 · 229 citations

Natural Sciences, Materials Engineering, Materials Science +17

Thin film interaction between titanium and polycrystalline silicon

S. P. Murarka, D. B. Fraser · Journal of Applied Physics · 1980 · 190 citations

Natural Sciences, Materials Engineering, Materials Science +17

Silicide formation in thin cosputtered (titanium + silicon) films on polycrystalline silicon and SiO2.

S. P. Murarka, D. B. Fraser · Journal of Applied Physics · 1980 · 131 citations

Engineering, Materials Engineering, Materials Science +17