Concepedia

T. Sandwick

TS

3

Publications

76

Citations

3

H-Index

1990

Active since

Affiliations

IBM (United States)(Current)

T. Sandwick is an author at IBM (United States) specializing in engineering, surface science, and applied physics.

Top concepts

EngineeringApplied PhysicsSurface ScienceChemical EngineeringChemistryCorrosionInstrumentationNanoelectronicsMaterial ScienceMicroelectronics

Publications per year

1990–1994

3

Publications

3

The oxidation of titanium silicide

T. Sandwick, Krishna Rajan · Journal of Electronic Materials · 1990 · 39 citations

Inorganic Chemistry, Chemical Engineering, Engineering +7

Shallow trench isolation for ultra-large-scale integrated devices

Kenneth A. Blumenstock, Johannes Theisen, Paihung Pan et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 23 citations

Engineering, Device Integration, Virtual Planar Surface +17

Boron Nitride and Silicon Boron Nitride Film and Polish Characterization

B. Neureither, C. Basa, T. Sandwick et al. · Journal of The Electrochemical Society · 1993 · 14 citations

Materials Science, Materials Engineering, Chemical Engineering +13

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