Concepedia

Kenneth A. Blumenstock

KA

7

Publications

136

Citations

7

H-Index

1984

Active since

Affiliations

Goddard Space Flight Center(Current)

Siemens (Germany)

IBM (United States)

Kenneth A. Blumenstock is an author at Goddard Space Flight Center specializing in engineering, applied physics, and surface science.

Top concepts

EngineeringApplied PhysicsMagnetismMagnetic DeviceSurface ScienceMaterial ScienceMechanical EngineeringMechatronicsInstrumentationMicroelectronics

Publications per year

1984–2002

7

Publications

7

Interface States and Fixed Charges in MNOS Structures with APCVD and Plasma Silicon Nitride

Rudolf Hezel, Kenneth A. Blumenstock, Reinhold Schörner · Journal of The Electrochemical Society · 1984 · 45 citations

Semiconductors, Materials Science, Electrical Engineering +15

Shallow trench isolation for ultra-large-scale integrated devices

Kenneth A. Blumenstock, Johannes Theisen, Paihung Pan et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 23 citations

Engineering, Device Integration, Virtual Planar Surface +17

Novel Integrated Radial and Axial Magnetic Bearing

Kenneth A. Blumenstock, Gary L. Brown, Edward I. Powers · NASA STI Repository (National Aeronautics and Space Administration) · 2000 · 16 citations · Full text

Magnetism, Magnetic Control Fluxes, Engineering +14

Anisotropic reactive ion etching of titanium

Kenneth A. Blumenstock, D. Stephani · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 15 citations

Materials Engineering, Materials Science, Chemical Engineering +10

Boron Nitride and Silicon Boron Nitride Film and Polish Characterization

B. Neureither, C. Basa, T. Sandwick et al. · Journal of The Electrochemical Society · 1993 · 14 citations

Materials Science, Materials Engineering, Chemical Engineering +13

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