CMOS-based microsensors and packaging

Surface micromachining for microelectromechanical systems

J.M. Bustillo, Roger T. Howe, R.S. Muller · Proceedings of the IEEE · 1998 · 639 citations

Engineering, Materials Engineering, Materials Science +17

A MEMS-based projection display

Peter F. Van Kessel, Larry J. Hornbeck, Reto Meier et al. · Proceedings of the IEEE · 1998 · 614 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Micromachined thermally based CMOS microsensors

H. Baltes, Oliver Paul, Oliver Brand · Proceedings of the IEEE · 1998 · 259 citations

Engineering, Electrical Engineering, Materials Science +17

Application of MEMS technology in automotive sensors and actuators

D.S. Eddy, D.R. Sparks · Proceedings of the IEEE · 1998 · 218 citations

Engineering, Automotive Engineering, Mechanical Engineering +16

An Integrated Force-balanced Capacitive Accelerometer For Low-G Applications

KW Chau, S. Lewis, Yu Zhao et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 189 citations

Engineering, Electrical Engineering, Mechanical Engineering +17