Concepedia

D.R. Sparks

DS

18

Publications

816

Citations

15

H-Index

1986

Active since

Affiliations

Integrated Sensing Systems (United States)(Current)

General Motors (United States)

Aptiv (United States)

D.R. Sparks is an author at Integrated Sensing Systems (United States) specializing in engineering, microfabrication, and mechanical engineering.

Top concepts

EngineeringMicrofabricationMechanical EngineeringMicroelectronicsInstrumentationMaterial ScienceMicrofluidicsApplied PhysicsMechatronicsElectronic Packaging

Publications per year

1986–2013

18

Publications

18

Application of MEMS technology in automotive sensors and actuators

D.S. Eddy, D.R. Sparks · Proceedings of the IEEE · 1998 · 217 citations

Mems Sensors, Engineering, Automotive Industry +17

Chip-level vacuum packaging of micromachines using nanogetters

D.R. Sparks, S. Massoud-Ansari, N. Najafi · IEEE Transactions on Advanced Packaging · 2003 · 88 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

A MEMS-Based Coriolis Mass Flow Sensor for Industrial Applications

R. Smith, D.R. Sparks, D. S. Riley et al. · IEEE Transactions on Industrial Electronics · 2008 · 79 citations

Industrial Applications, Engineering, Fluid Mechanics +20

Long-term evaluation of hermetically glass frit sealed silicon to Pyrex wafers with feedthroughs

D.R. Sparks, S. Massoud-Ansari, Nader Najafi · Journal of Micromechanics and Microengineering · 2005 · 66 citations

Engineering, Mechanical Engineering, Glass Frit +16

Anomalous diffusion and gettering of transition metals in silicon

D.R. Sparks, Randall G. Chapman, N. S. Alvi · Applied Physics Letters · 1986 · 47 citations

Materials Science, Semiconductors, Engineering +11

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