N. S. Alvi

Silicided shallow junction formation by ion implantation of impurity ions into silicide layers and subsequent drive-in

Dim‐Lee Kwong, Y. H. Ku, S. K. Lee et al. · Journal of Applied Physics · 1987 · 64 citations

Shallow Junctions, Engineering, Semiconductor Materials +21

Anomalous diffusion and gettering of transition metals in silicon

D.R. Sparks, Randall G. Chapman, N. S. Alvi · Applied Physics Letters · 1986 · 47 citations

Materials Science, Semiconductors, Engineering +11

Refractory metal silicide formation by ion beam mixing and rapid thermal annealing

Dim‐Lee Kwong, D. C. Meyers, N. S. Alvi et al. · Applied Physics Letters · 1985 · 35 citations

Materials Science, Materials Engineering, Rapid Diffusion +14

Simultaneous formation of silicide ohmic contacts and shallow p⁺-n junctions by ion-beam mixing and rapid thermal annealing

Dim‐Lee Kwong, D. C. Meyers, N. S. Alvi · IEEE Electron Device Letters · 1985 · 31 citations

Engineering, Simultaneous Formation, Optoelectronic Devices +16

Electrical characterization of Ti-silicided shallow junctions formed by ion-beam mixing and rapid thermal annealing

D. L. Kwong, N. S. Alvi · Journal of Applied Physics · 1986 · 27 citations

Engineering, Implant Dose, Integrated Circuits +19