Concepedia

Multilayer thin-film filters of extreme ultraviolet and soft X-ray spectral regions

B. A. Volodin, S. Yu. Zuev, E. B. Klyuenkov, A. Ya. Lopatin

Bulletin of the Russian Academy of Sciences Physics · 2010 · 14 citations · 5 references

DOI

Abstract

Multilayer thin-film filters from different materi al pairs with spectral windows within the wavelength range 7n < 60 nm were developed. Optical characteristics of samples in the extreme ultraviolet, visible, and IR spectrum ranges were studied. Ultrathin freestanding Zr/Si large-aperture filters with transparencies up to 76% at 7n = 13 nm were manufactured for projection lithography test benches; variations in their properties during long-term thermal loads were studied.

References

5

&lt;title&gt;Laboratory methods for investigations of multilayer mirrors in extreme ultraviolet and soft x-ray region&lt;/title&gt;

M. S. Bibishkin, D. P. Chekhonadskih, E. B. Kluyenkov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 51 citations

, , +22

&lt;title&gt;Multilayer Zr/Si filters for EUV lithography and for radiation source metrology&lt;/title&gt;

M. S. Bibishkin, E. B. Kluenkov, A. Ya. Lopatin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 40 citations

, , +19

&lt;title&gt;Filter windows for EUV lithography&lt;/title&gt;

Forbes R. Powell, Terry A. Johnson · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 22 citations

, , +19

Application of free-standing multilayer films as polarizers for X-ray radiation

S. S. Andreev, M. S. Bibishkin, A. Ya. Lopatin et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2005 · 18 citations

, , +9

Fabrication of multilayer thin film filters on support screens and their properties

A. V. Mitrofanov, D N Tokarchuk · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1989 · 11 citations

, , +13