Integration of grating-image-type encoder using Si micromachining

A compact optical encoder with micromachined photodetector

Kazuhiro Hane, Tomoyuki Endo, Y. Ito et al. · Journal of Optics A Pure and Applied Optics · 2001 · 32 citations

Imaging with rectangular transmission gratings

Kazuhiro Hane, Chander P. Grover · Journal of the Optical Society of America A · 1987 · 18 citations

Optical Design, Engineering, Microscopy +23

Optical encoder using a slit-width-modulated grating

Atsushi Ieki, Kazuhiro Hane, Tsuyoshi Yoshizawa et al. · Journal of Modern Optics · 1999 · 16 citations

Photonics, Engineering, Diffractive Optic +11

Pitch-modulated phase grating and its application to displacement encoder

Atsushi Ieki, Kohei Matsui, Masayuki Nashiki et al. · Journal of Modern Optics · 2000 · 14 citations

Modulated Pitch, Binary Phase, Fresnel Diffraction Theory +4

<title>Analysis Of Grating Imaging And Its Application To Displacement Metrology</title>

Richard M. Pettigrew · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1978 · 12 citations