Thin Solid Films · 2005 · 62 citations · 26 references
Natural SciencesMaterials EngineeringMaterials ScienceCatalysisPhysical ChemistryThin FilmsAtomic Layer DepositionCatalytic Reaction EngineeringCatalytic Reactor DesignThin Film NucleationThin Film OxidationThin-film DepositionAtomic Layer Deposition InterfacesAtomic Layer Deposition KineticsAtomic Layer Deposition NucleationAtomic Layer Deposition PrecursorsFilm Growth MechanismsOxide Growth KineticsThin-film Growth KineticsThin-film Growth Mechanisms
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Surface Chemistry for Atomic Layer Growth
Steven M. George, A. W. Ott, J. W. Klaus · The Journal of Physical Chemistry · 1996 · 676 citations
Mohamed I. Zaki, Muhammad Hasan, Fakhreia Al‐Sagheer et al. · Colloids and Surfaces A Physicochemical and Engineering Aspects · 2001 · 590 citations · Full text