Failure analysis of micro-heating elements suspended on thin membranes

Micromachined metal oxide gas sensors: opportunities to improve sensor performance

Isolde Simon, Nicolae Bârsan, Michael Bauer et al. · Sensors and Actuators B Chemical · 2001 · 645 citations

Engineering, Materials Engineering, Materials Science +14

Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors

D. Briand, B. van der Schoot, Udo Weimar et al. · Sensors and Actuators B Chemical · 2000 · 188 citations

Engineering, Materials Engineering, Materials Science +14

Pyrotechnic actuator: a new generation of Si integrated actuator

Carole Rossi, D. Estève, Corinne Mingués · Sensors and Actuators A Physical · 1999 · 76 citations

Engineering, Mechanical Engineering, Actuators +9

Backside localization of open and shorted IC interconnections

Edward I. Cole, Paiboon Tangyunyong, Daniel L. Barton · 1998 · 76 citations · Full text

Engineering, Computer Engineering, Electrical Engineering +17

Operation and short-term drift of polysilicon-heated CMOS microstructures at temperatures up to 1200 K

M. Ehmann, Patrick Ruther, M. von Arx et al. · Journal of Micromechanics and Microengineering · 2001 · 47 citations

Engineering, Electrical Engineering, Materials Science +15