M. von Arx

Wireless micromachined ceramic pressure sensor for high-temperature applications

Michael A. Fonseca, Jennifer M. English, M. von Arx et al. · Journal of Microelectromechanical Systems · 2002 · 316 citations

High-temperature Applications, Electrical Engineering, Energy Harvesting +13

Process-dependent thin-film thermal conductivities for thermal CMOS MEMS

M. von Arx, Oliver Paul, H. Baltes · Journal of Microelectromechanical Systems · 2000 · 179 citations

Engineering, /Spl Kappa/, Silicon On Insulator +16

Process-dependent Thermophysical Properties Of CMOS IC Thin Films

Oliver Paul, M. von Arx, H. Baltes · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 46 citations

Materials Science, Process-dependent Thermophysical Properties, Electrical Engineering +15

Operation and short-term drift of polysilicon-heated CMOS microstructures at temperatures up to 1200 K

M. Ehmann, Patrick Ruther, M. von Arx et al. · Journal of Micromechanics and Microengineering · 2001 · 46 citations

Engineering, Mechanical Engineering, Integrated Chemical Sensors +22

Test structures to measure the Seebeck coefficient of CMOS IC polysilicon

M. von Arx, Oliver Paul, H. Baltes · IEEE Transactions on Semiconductor Manufacturing · 1997 · 38 citations

Engineering, Silicon On Insulator, Thermal Conductivity +23