Thermal stability of indium nitride single crystal films

Abstract

We examine the thermal stability of InN single crystal films. The films are not entirely stable and degrade at relatively low temperatures. No change on the surface of the film is found after heating the samples up to 500 °C in nitrogen atmosphere. However, if the films are heated above 550 °C, the surface undergoes a considerable change, owing to the decomposition and desorption of nitrogen.