High density distributed microwave plasma sources in a matrix configuration: concept, design and performance - Concepedia

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High density distributed microwave plasma sources in a matrix configuration: concept, design and performance

45

Citations

11

References

2006

Year

L. Latrasse, A. Lacoste, J Sirou, Jacques Pelletier

Plasma Sources Science and Technology

Abstract

International audience

References

	Year	Citations

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