Concepedia

High density distributed microwave plasma sources in a matrix configuration: concept, design and performance

L. Latrasse, A. Lacoste, J Sirou, Jacques Pelletier

Plasma Sources Science and Technology · 2006 · 46 citations · 11 references

DOI

Concepts

Abstract

International audience

References

11

A microwave plasma torch assembly for atomic emission spectrometry

Qinhan Jin, Chu Zhu, Matthew W. Border et al. · Spectrochimica Acta Part B Atomic Spectroscopy · 1991 · 192 citations

, , +11

Microwave multipolar plasmas excited by distributed electron cyclotron resonance: Concept and performance

M. Pichot, A. Durandet, Jacques Pelletier et al. · Review of Scientific Instruments · 1988 · 131 citations

, , +12

Role of Ar2+ and Ar2+ ions in a direct current argon glow discharge: A numerical description

Annemie Bogaerts, R. Gijbels · Journal of Applied Physics · 1999 · 90 citations

, , +14

Multi-dipolar plasmas for uniform processing: physics, design and performance

A. Lacoste, T. Lagarde, Shih‐I Chu et al. · Plasma Sources Science and Technology · 2002 · 89 citations

, , +11

The Electronic Torch and Related High Frequency Phenomena

J. D. Cobine, D. A. Wilbur · Journal of Applied Physics · 1951 · 80 citations

, , +7