Formation of Si nanocrystals by heavy ion irradiation of amorphous SiO films

D. Yu. Rodichev, Ph. Lavallard, E. Dooryhée, A. Slaoui, J. Perrière, M. Gandais, Y. Wang

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1996 · 41 citations · 8 references

Concepts

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