Fabrication of silicon oxide microneedles from macroporous silicon

Formation Mechanism and Properties of Electrochemically Etched Trenches in n‐Type Silicon

V. Lehmann, H. Föll · Journal of The Electrochemical Society · 1990 · 798 citations

Engineering, Electrical Engineering, Materials Science +17

The Physics of Macropore Formation in Low Doped n‐Type Silicon

V. Lehmann · Journal of The Electrochemical Society · 1993 · 692 citations

Engineering, Materials Engineering, Materials Science +17

The Physics of Macropore Formation in Low‐Doped p‐Type Silicon

V. Lehmann, Silke Rönnebeck · Journal of The Electrochemical Society · 1999 · 462 citations

Engineering, Materials Engineering, Materials Science +17

Asymmetric pores in a silicon membrane acting as massively parallel brownian ratchets

Sven Matthias, Frank Müller · Nature · 2003 · 383 citations

Natural Sciences, Biophysics, Materials Science +16

The limits of macropore array fabrication

V. Lehmann, U. Grüning · Thin Solid Films · 1997 · 161 citations

Engineering, Materials Engineering, Materials Science +10