Concepedia
Thin Solid Films · 1997 · 161 citations · 3 references
EngineeringMaterials EngineeringMaterials ScienceBiomaterialsMicrofabricationNanomaterialsFabrication MaterialsMembrane FabricationMicrofluidicsMicrostructure ControlArray FabricationMass Production Of NanostructuresMicrochannel Fabrication
3
Formation Mechanism and Properties of Electrochemically Etched Trenches in n‐Type Silicon
V. Lehmann, H. Föll · Journal of The Electrochemical Society · 1990 · 798 citations
Engineering, Electrical Engineering, Materials Science +17
The Physics of Macropore Formation in Low Doped n‐Type Silicon
V. Lehmann · Journal of The Electrochemical Society · 1993 · 692 citations
Engineering, Materials Engineering, Materials Science +17
Macroporous silicon with a complete two-dimensional photonic band gap centered at 5 μm
U. Grüning, V. Lehmann, S. Ottow et al. · Applied Physics Letters · 1996 · 312 citations