Publication | Closed Access
Compositional and structural studies of DC magnetron sputtered SiC films on Si(111)
23
Citations
11
References
2000
Year
Materials ScienceMaterials EngineeringEngineeringSurface ScienceApplied PhysicsDc MagnetronSemiconductor MaterialSic FilmsSemiconductor Device FabricationThin FilmsStructural StudiesThin Film ProcessingCarbide
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